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1
E-Book
Materials science in microelectronics. 2 [E-Book] : the effect of structure on properties in thin films /
Machlin, E. S.
2006
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2
E-Book
Materials science in microelectronics. 1 [E-Book] : the relationship between thin film processing and structure /
Machlin, E. S.
2005
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3
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Materials science in microelectronics. 2. The effects of structure on properties in thin films /
Machlin, Eugene S.
1998
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4
Book
Materials science in microelectronics. 1. The relationships between thin film processing and structure /
Machlin, Eugene S.
1995
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Available as
Electronic Edition
2
Print Edition
2
Material Type
Book
4
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ZB
4
IEK-5
1
Name
Machlin, E. S.
2
Machlin, Eugene S.
2
Subject
microelectronics
2
thin film technology
2
defect
1
electrical properties
1
film deposition
1
magnetic properties
1
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mechanical properties
1
optical properties
1
structure
1
transport properties
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Classification
FGK - Thin film technology, epitaxy
2
FGM - Microelectronic technology
2
FFP - Physics of thin films
1
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