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Three-dimensional microfabrication using two-photon polymerization /
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Subject (ZB): “...microlithography...”
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A lithographer’s guide to patterning CMOS devices with directed self-assembly [E-Book] /
Subject (ZB): “...Microlithography....”

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Principles of lithography [E-Book] /
Subject (ZB): “...Microlithography....”

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Lithography : principles, processes and materials [E-Book] /
Subject (ZB): “...Microlithography....”

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Lithography : main techniques [E-Book] /
Subject (ZB): “...Microlithography....”

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Computational lithography / [E-Book]
Ma, Xu
2010
Subject (ZB): “...Microlithography Mathematics....”

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Fundamental principles of optical lithography : the science of microfabrication [E-Book] /
Subject (ZB): “...Microlithography Industrial applications....”

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Alternative lithography : unleashing the potentials of nanotechnology /
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Subject (ZB): “...microlithography...”
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Principles of lithography /
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Subject (ZB): “...microlithography...”
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Materials issues and modeling for device nanofabrication : symposia held November 29 - December 2, 1999, Boston, Massachusetts, USA /
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Subject (ZB): “...microlithography...”
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Mikroelektronik. 2. Herstellungsprozesse für integrierte Schaltungen /
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Subject (ZB): “...microlithography...”
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Mikrostrukturierung von porösem Silicium für optische und optoelektronische Anwendungen /
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Subject (ZB): “...microlithography...”
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Emerging lithographic technologies : proceedings 10-11 March 1997 Santa Clara, California /
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Subject (ZB): “...microlithography...”
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Handbook of microlithography, micromachining, and microfabrication. 1. Microlithography /
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Subject (ZB): “...microlithography...”
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Handbook of microlithography, micromachining, and microfabrication. 2. Micromachining and microfabrication /
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Subject (ZB): “...microlithography...”
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Introduction to microlithography.
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Subject (ZB): “...microlithography...”
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Mikromechanik : Einführung in Technologie und Anwendungen.
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Subject (ZB): “...microlithography...”
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Resists in microlithography and printing.
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Bednar, B.
1993
Subject (ZB): “...microlithography...”
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The Physics of submicron lithography /
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Subject (ZB): “...microlithography...”
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Metallic structures with reduced dimensions /
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Subject (ZB): “...microlithography...”
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