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FGKJ - Plasma processing, etching
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FGKJ - Plasma processing, etching
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1
Book
Plasma chemistry. 3.
Veprek, S.
1980
“
...
PGLJ
-
Plasma
wall
interaction
,
divertors
...
”
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INM-5
1
ZB
1
Name
Veprek, S.
1
Subject
plasma etching
1
plasma wall interaction
1
Classification
CLD - High temperature chemistry, plasma chemistry
1
FGKJ - Plasma processing, etching
PGLJ - Plasma wall interaction, divertors
1
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