1
Field assisted sintering of yttria ceramics for plasma etching applications /
Book
Subject (ZB): ...plasma etching...
Table of Contents 
2
Micromachining using electrochemical discharge phenomenon [E-Book] : fundamentals and applications of spark assisted chemical engraving /
3
Principles of plasma discharges and materials processing /
Book
Subject (ZB): ...plasma etching...
Table of Contents 
4
Low temperature plasma physics : fundamental aspects and applications /
Book
Subject (ZB): ...plasma etching...
5
Plasma processes for semiconductor fabrications /
Book
Subject (ZB): ...plasma etching...
6
Plasma Processes for Semiconductor Fabrication [E-Book] /
7
Handbook of industrial diamonds and diamond films /
Book
Subject (ZB): ...plasma etching...
8
Ein anisotroper Plasmaätzprozess in Silizium für die Mikromechanik.
Book
Subject (ZB): ...plasma etching...
9
Modeling and simulation of thin film processing : Symposium on modeling and simulation of thin film processing: proceedings: papers : San-Francisco, CA, 17.04.95-20.04.95.
Book
10
Plasma processing and processing science / [E-Book]
11
Introduction to microlithography.
Book
Subject (ZB): ...plasma etching...
12
Cold plasma in materials fabrication : from fundamentals to applications /
Book
Subject (ZB): ...plasma etching...
13
Plasma sources for thin film deposition and etching.
Book
Subject (ZB): ...plasma etching...
14
Photons and low energy particles in surface processing: symposium: Boston, MA, 03.12.91-06.12.91 /
Book
Subject (ZB): ...plasma etching...
15
Plasma deposition, treatment, and etching of polymers /
Book
Subject (ZB): ...plasma etching...
16
Kalte Plasmen : Grundlagen, Erscheinungen, Anwendungen /
Book
Subject (ZB): ...plasma etching...
17
Plasma-surface interactions and processing of materials : NATO Advanced Study Institute on Plasma Surface Interactions and Processing of Materials: proceedings : Alicante, 04.09.88-16.09.88 /
Book
18
Plasma etching : an introduction /
Book
Subject (ZB): ...plasma etching...
19
International Conference on Phenomena in Ionized Gases. 19. Contributed papers 3 Wednesday 12th July 1989 : Beograd, 10th - 14th July 1989 /
Book
20
Plasma surface engineering vol 0001 : International conference on plasma surface engineering 0001: papers : Garmisch-Partenkirchen, 19.09.88-23.09.88.
Book