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1
Book
Silicon processing for the VLSI era. 1. Process technology /
Wolf, Stanley.
2000
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2
Book
Silicon processing for the VLSI era. 3. The submicron MOSFET.
Wolf, Stanley.
1995
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3
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Silicon processing for the VLSI era. 2. Process integration.
Wolf, Stanley.
1990
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4
Book
Silicon processing for the VLSI era. 1. Process technology /
Wolf, Stanley.
1986
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Available as
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4
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4
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ZB
4
IBN-1-2
1
IFF
1
Name
Wolf, Stanley.
4
Tauber, Richard N.
2
Subject
VLSI technology
3
silicon
3
integrated circuit
2
MOS device
1
MOS transistor
1
VLSI (very large scale integration)
1
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isolation
1
microelectronics
1
processing
1
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FGM - Microelectronic technology
4
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