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Microelectronic applications of chemical mechanical planarization /
Book
Li, Yuzhuo
2008
“...TBJ - Integrated circuits...”
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Fundamentals of microfabrication : the science of miniaturization /
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“...TBJ - Integrated circuits...”
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Characterization and metrology for ULSI technology : 1998 international conference Gaithersburg, Maryland [23. - 27.] March 1998 : [the 1998 International Conference on Characterization and Metrology for ULSI Technology] /
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“...TBJ - Integrated circuits...”
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