1
Ultrathin SiO2 and high-K materials for ULSI gate dielectrics : symposium held April 5 - 8, 1999, San Francisco, California, USA [at the 1999 MRS spring meeting] /
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Subject (ZB): “...ULSI (ultra large scale integration)...”
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2
Gate dielectrics and MOS ULSls : principles, technologies and applications /
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Subject (ZB): “...ULSI (ultra large scale integration)...”
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3
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, USA : [Symposium on Advanced Metallization for Future ULSI] /
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Tu, K. N.
1997
Subject (ZB): “...ULSI (ultra large scale integration)...”
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4
ULSI technology /
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Subject (ZB): “...ULSI (ultra large scale integration)...”
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5
Submicrometer metallization: the challenges, opportunities, and limitations : Submicrometer metallization: the challenges, opportunities, and limitations: conference : SPIE symposium on microelectronic processing : San-Jose, CA, 23.09.92-25.09.92.
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Kwok, T.
1993
Subject (ZB): “...ULSI (ultra large scale integration)...”
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6
International symposium on ultra large scale integration science and technology . 3: proceedings : ULSI science and technology 1991: proceedings : Washington, DC, 05.05.91-10.05.91 /
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Subject (ZB): “...ULSI (ultra large scale integration)...”
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