1
Handbook of microlithography, micromachining, and microfabrication. 1. Microlithography /
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Subject (ZB): “...X-ray lithography...”
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2
Materials aspects of x-ray lithography : Symposium on materials aspects of x-ray lithography: papers : MRS spring meeting : San-Francisco, CA, 12.04.93-14.04.93.
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Subject (ZB): “...X-ray lithography...”
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3
Accelerator science and technology vol 0003 : IEEE particle accelerator conference 1991: conference record vol 0003 : San-Francisco, CA, 06.05.91-09.05.91.
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Lizama, L.
1991
Subject (ZB): “...X-ray lithography...”
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4
Accelerator science and technology vol 0004 : IEEE particle accelerator conference 1991: conference record vol 0004 : San-Francisco, CA, 06.05.91-09.05.91.
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Lizama, L.
1991
Subject (ZB): “...X-ray lithography...”
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5
X-ray instrumentation in medicine and biology, plasma physics, astrophysics, and radiation: proceedings : ECO. 0002: proceedings : Paris, 25.04.89-28.04.89.
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Subject (ZB): “...X-ray lithography...”
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6
Accelerator science and technology. vol 0002 : IEEE particle accelerator conference. 1989, vol 0002: proceedings : Chicago, IL, 20.03.89-23.03.89.
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Subject (ZB): “...X-ray lithography...”
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7
Vacuum design of advanced and compact synchrotron light sources : Topical conference on vacuum design of advanced and compact synchrotron light sources : Upton, NY, 16.05.88-18.05.88.
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Subject (ZB): “...X-ray lithography...”
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8
Electron beam, x-ray, and ion beam techniques for submicrometer lithographies. 3 /
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Wagner, A.
1984
Subject (ZB): “...X-ray lithography...”
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9
X-ray lithography and applications of soft X-rays to technology : Upton, NY, 19.10.83-20.10.83 /
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Subject (ZB): “...X-ray lithography...”
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10
Fine line lithography.
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Newman, R.
1980
Subject (ZB): “...X-ray lithography...”
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11
Symposium on electron and ion beam science and technology. 8 : proceedings Seattle, WA, 22.05.78.
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Bakish, R.
1978
Subject (ZB): “...X-ray lithography...”
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