1
Surface patterning by means of soft lithography for molecular and bio-electronics [E-Book] /
Subject (ZB): “...electron beam lithography...”

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2
Handbook of microlithography, micromachining, and microfabrication. 1. Microlithography /
Book
Subject (ZB): “...electron beam lithography...”
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3
Emerging lithographic technologies : proceedings 10-11 March 1997 Santa Clara, California /
Book
Subject (ZB): “...electron beam lithography...”
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4
Advances in electronics and electron physics. Microelectronics and microscopy /
Book
Subject (ZB): “...electron beam lithography...”
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5
Electron beam, x-ray, and ion beam techniques for submicrometer lithographies. 3 /
Book
Wagner, A.
1984
Subject (ZB): “...electron beam lithography...”
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6
Fine line lithography.
Book
Newman, R.
1980
Subject (ZB): “...electron beam lithography...”
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7
International conference on electron and ion beam science and technology. 6 : San-Francisco, CA, 12.05.74-17.05.74.
Book
Bakish, R.
1974
Subject (ZB): “...electron beam welding...”
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8
On the throughput optimization of electron beam lithography systems /
Book
Subject (ZB): “...electron beam lithography...”
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