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Photons and low energy particles in surface processing: symposium: Boston, MA, 03.12.91-06.12.91 /
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Subject (ZB): “...plasma etching...”
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In situ patterning: selective area deposition and etching: symposium : Boston, MA, 29.11.89-01.12.89.
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Subject (ZB): “...etching...”
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Plasma synthesis and etching of electronic materials : Symp : Boston, MA, 27.11.1984-30.11.1984.
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Subject (ZB): “...plasma etching...”
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