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Photons and low energy particles in surface processing: symposium: Boston, MA, 03.12.91-06.12.91 /
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Subject (ZB): “...plasma etching...”
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In situ patterning: selective area deposition and etching: symposium : Boston, MA, 29.11.89-01.12.89.
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Subject (ZB): “...etching...”
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Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators.
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Subject (ZB): “...etching...”
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Laser assisted deposition, etching, and doping : Los-Angeles, CA, 26.01.1984-27.01.1984 /
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Subject (ZB): “...etching...”
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