1
Field assisted sintering of yttria ceramics for plasma etching applications /
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Principles of plasma discharges and materials processing /
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Low temperature plasma physics : fundamental aspects and applications /
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Handbook of advanced plasma processing techniques /
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Plasma processes for semiconductor fabrications /
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6
Proceedings of the Eleventh International Symposium on Plasma Processing : [held in Los Angeles, CA, May 5-10, 1996 .... was held as part of the 189th meeting of the Electrochemial Society] /
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Subject (ZB): “...etching...”
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Proceedings of the symposium on high rate metal dissolution processes /
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Subject (ZB): “...etching...”
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8
Vakuumbeschichtung Vol 0002: Verfahren und Anlagen.
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Kienel, G.
1995
Subject (ZB): “...etching...”
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9
Plasma sources for thin film deposition and etching.
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Subject (ZB): “...plasma etching...”
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10
Etching of III-V semiconductors : an electrochemical approach /
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11
Plasma deposition, treatment, and etching of polymers /
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12
In situ patterning: selective area deposition and etching: symposium : Boston, MA, 29.11.89-01.12.89.
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Subject (ZB): “...etching...”
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13
Halbleiterätzverfahren: Kinetik, Verfahrensgrundlagen und Anwendungsgebiete von nasschemischen Ätzverfahren für Silizium, Galliumarsenid, Galliumphosphid und Indiumphosphid.
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Loewe, H.
1990
Subject (ZB): “...etching...”
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14
Kalte Plasmen : Grundlagen, Erscheinungen, Anwendungen /
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Subject (ZB): “...plasma etching...”
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15
Plasma-surface interactions and processing of materials : NATO Advanced Study Institute on Plasma Surface Interactions and Processing of Materials: proceedings : Alicante, 04.09.88-16.09.88 /
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Plasma etching : an introduction /
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17
Plasma surface engineering vol 0001 : International conference on plasma surface engineering 0001: papers : Garmisch-Partenkirchen, 19.09.88-23.09.88.
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18
Etching of crystals : theory, experiment, and application /
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19
Plasma synthesis and etching of electronic materials : Symp : Boston, MA, 27.11.1984-30.11.1984.
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Plasma etching in semiconductor fabrication.
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