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FGM - Microelectronic technology
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1
E-Book
Elektroneninterferenzeffekte in modulationsdotierten Al0.3Ga0.7As/GaAs-Heterostrukturen [E-Book] /
Krafft, Birgit
2000
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2
Book
Handbook of advanced plasma processing techniques /
Shul, R. J.
2000
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3
E-Book
Optische und elektrische Eigenschaften von Schichtsystemen aus porösem Silizium [E-Book] /
Hunkel, Dirk Georg
1999
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4
Book
Mikroelektronik. 2. Herstellungsprozesse für integrierte Schaltungen /
Hoppe, Bernhard.
1998
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ULSI technology /
Chang, C. Y.
1996
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6
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Supraleitende Schalter aus gestapelten Niob-Mikrobrücken [E-Book] /
Becker, Thomas
1990
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7
Book
Microelectronics processing: chemical engineering aspects /
Hess, D. W.
1989
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8
Book
Dry etching for microelectronics.
Powell, R. A.
1984
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Available as
Print Edition
5
Electronic Edition
3
Material Type
Book
8
Type of Literature
Theses
3
Handbook, Textbook
1
Year of Publication
From:
To:
Location
ZB
7
IBN-1-2
1
IEK-5
1
IFF
1
Name
Becker, Thomas
1
Chang, C. Y.
1
Hess, D. W.
1
Hoppe, Bernhard.
1
Hunkel, Dirk Georg
1
Krafft, Birgit
1
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Powell, R. A.
1
Shul, R. J.
1
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Subject
etching
7
chemical vapor deposition
3
epitaxy
2
materials processing
2
microelectronics
2
microlithography
2
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ULSI (ultra large scale integration)
1
VLSI technology
1
compound semiconductor
1
diffusion
1
electrical properties
1
electronic packaging
1
fabrication
1
film deposition
1
heterostructure
1
interference
1
ion implantation
1
liquid phase epitaxy
1
lithography
1
magnetic material
1
metallization
1
microfabrication (for microelectronics only)
1
niobium
1
optical properties
1
photoresist
1
plasma etching
1
plasma processing
1
porous silicon
1
reliability
1
semiconductor device
1
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Classification
FGM - Microelectronic technology
FFPG - Multilayer systems, quantum structures
2
FGKJ - Plasma processing, etching
2
FGK - Thin film technology, epitaxy
1
FJKB - Elemental semiconductors
1
FJLB - Physics of semiconductor devices
1
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FLGD - Superconducting devices, circuits
1
TBL - VLSI
1
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Language
German
3
English
1
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