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Chemistry and lithography. 1. The chemical history of lithography [E-Book] /
Subject (ZB): “...Semiconductors -- Etching....”

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2
A novel green treatment for textiles : plasma treatment as a sustainable technology [E-Book] /
Subject (ZB): “...Textile fibers -- Etching....”

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3
Computational lithography / [E-Book]
Ma, Xu
2010
Subject (ZB): “...Semiconductors Etching Mathematics....”

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4
Micromachining using electrochemical discharge phenomenon [E-Book] : fundamentals and applications of spark assisted chemical engraving /
Subject (ZB): “...Plasma etching....”

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5
Elektroneninterferenzeffekte in modulationsdotierten Al0.3Ga0.7As/GaAs-Heterostrukturen [E-Book] /
Subject (ZB): “...etching...”

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6
Optische und elektrische Eigenschaften von Schichtsystemen aus porösem Silizium [E-Book] /
Subject (ZB): “...etching...”

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7
Plasma Processes for Semiconductor Fabrication [E-Book] /
Subject (ZB): “...Plasma etching....”

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8
Solid-liquid electrochemical interfaces [E-Book] /
Subject (ZB): “...Etching -- Molecular aspects....”

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9
Plasma processing and processing science / [E-Book]
Subject (ZB): “...Semiconductors Etching....”

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10
Supraleitende Schalter aus gestapelten Niob-Mikrobrücken [E-Book] /
Subject (ZB): “...etching...”

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11
Introduction to microlithography : theory, materials, and processing [E-Book] /
Subject (ZB): “...Plasma etching....”

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