1
Solid-liquid electrochemical interfaces [E-Book] /
Subject (ZB): “...Etching -- Molecular aspects....”

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Proceedings of the Eleventh International Symposium on Plasma Processing : [held in Los Angeles, CA, May 5-10, 1996 .... was held as part of the 189th meeting of the Electrochemial Society] /
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Subject (ZB): “...etching...”
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3
Proceedings of the symposium on high rate metal dissolution processes /
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Subject (ZB): “...etching...”
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4
Modeling and simulation of thin film processing : Symposium on modeling and simulation of thin film processing: proceedings: papers : San-Francisco, CA, 17.04.95-20.04.95.
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Subject (ZB): “...plasma etching...”
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5
International Conference on Indium Phosphide and Related Materials. 7 : (IPRM 1995), proceedings : Sapporo, 9. - 13.-5.1995.
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1995
Subject (ZB): “...etching...”
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6
International Conference on Indium Phosphide and Related Materials I. 6 : (IPRM 6) : proceedings, Santa-Barbara, CA, 27. - 31.3.1994.
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1994
Subject (ZB): “...etching...”
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7
E.C. Photovoltaic Solar Energy Conference. 11 : proceedings of the international conference, held at Montreux, Switzerland, 12-16 October 1992 /
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Subject (ZB): “...etching...”
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8
Excimer lasers and new trends in laser microtechnology : International symposium workshop on excimer lasers and new trends in laser microtechnology: papers : Bremen, 10.11.92-13.11.92.
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Metev, S.
1993
Subject (ZB): “...chemical etching...”
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9
Photons and low energy particles in surface processing: symposium: Boston, MA, 03.12.91-06.12.91 /
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Subject (ZB): “...plasma etching...”
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In situ patterning: selective area deposition and etching: symposium : Boston, MA, 29.11.89-01.12.89.
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Subject (ZB): “...etching...”
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11
Plasma-surface interactions and processing of materials : NATO Advanced Study Institute on Plasma Surface Interactions and Processing of Materials: proceedings : Alicante, 04.09.88-16.09.88 /
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Subject (ZB): “...plasma etching...”
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12
International Conference on Phenomena in Ionized Gases. 19. Contributed papers 3 Wednesday 12th July 1989 : Beograd, 10th - 14th July 1989 /
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Subject (ZB): “...plasma etching...”
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13
Plasma surface engineering vol 0001 : International conference on plasma surface engineering 0001: papers : Garmisch-Partenkirchen, 19.09.88-23.09.88.
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Subject (ZB): “...plasma etching...”
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14
Plasma synthesis and etching of electronic materials : Symp : Boston, MA, 27.11.1984-30.11.1984.
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Subject (ZB): “...plasma etching...”
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15
Laser assisted deposition, etching, and doping : Los-Angeles, CA, 26.01.1984-27.01.1984 /
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Subject (ZB): “...etching...”
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16
Advances in thin film technology : Sputtering and etching : Materials Research Corporation : sputtering schools. 34 and 35 : Roma, Santa-Barbara, CA, 06.84 ; 11.84.
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Weinig, S.
1984
Subject (ZB): “...ion etching...”
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17
The physics of VLSI : Proceedings of the international conf : Physics of semiconductors : international conference. 0017 : Palo-Alto, CA, San-Francisco, CA, 01.08.1984-03.08.1984 ; 06.08.1984-10.08.1984.
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Subject (ZB): “...ion etching...”
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18
Introduction to microlithography : theory, materials, and processing [E-Book] /
Subject (ZB): “...Plasma etching....”

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19
Preparation and characterization : Film preparation and etching by plasma technology : international seminar : Brighton, 25.03.81-27.03.81.
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1981
Subject (ZB): “...plasma etching...”
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20
Plasma processing : Plasma etching and deposition: proceedings of the symposium : Electrochemical Society: spring meeting. 1980 : Saint-Louis, MO, 11.05.1980-16.05.1980.
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Subject (ZB): “...plasma etching...”
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