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1

Principles of plasma discharges and materials processing /

Book

Principles of plasma discharges and materials processing /

Lichtenberg, Allan J.
2005

Subject (ZB): “...plasma etching...”
Table of Contents

2

Low temperature plasma physics : fundamental aspects and applications /

Book

Low temperature plasma physics : fundamental aspects and applications /

Hippler, Rainer
2001

Subject (ZB): “...plasma etching...”

3

Atomic layer processing : semiconductor dry etching technology /

Book

Atomic layer processing : semiconductor dry etching technology /

Lill, Thorsten

Subject (ZB): “...etching...”
Table of Contents

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