1
Transparent conductive zinc oxide : basics and applications in thin film solar cells /
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Subject (ZB): “...etching...”
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Principles of plasma discharges and materials processing /
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Subject (ZB): “...plasma etching...”
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Modeling and simulation of thin film processing : Symposium on modeling and simulation of thin film processing: proceedings: papers : San-Francisco, CA, 17.04.95-20.04.95.
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Subject (ZB): “...plasma etching...”
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Plasma sources for thin film deposition and etching.
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Subject (ZB): “...plasma etching...”
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