21
Handbook of industrial diamonds and diamond films /
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Subject (ZB): “...plasma etching...”
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Mikroelektronik. 2. Herstellungsprozesse für integrierte Schaltungen /
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Subject (ZB): “...etching...”
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23
Solid-liquid electrochemical interfaces [E-Book] /
Subject (ZB): “...Etching -- Molecular aspects....”

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ULSI technology /
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Subject (ZB): “...etching...”
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Advances in catalysis. 41 /
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Subject (ZB): “...etching...”
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26
Proceedings of the Eleventh International Symposium on Plasma Processing : [held in Los Angeles, CA, May 5-10, 1996 .... was held as part of the 189th meeting of the Electrochemial Society] /
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Subject (ZB): “...etching...”
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Proceedings of the symposium on high rate metal dissolution processes /
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Subject (ZB): “...etching...”
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28
Modeling and simulation of thin film processing : Symposium on modeling and simulation of thin film processing: proceedings: papers : San-Francisco, CA, 17.04.95-20.04.95.
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Subject (ZB): “...plasma etching...”
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International Conference on Indium Phosphide and Related Materials. 7 : (IPRM 1995), proceedings : Sapporo, 9. - 13.-5.1995.
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1995
Subject (ZB): “...etching...”
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Ein anisotroper Plasmaätzprozess in Silizium für die Mikromechanik.
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Subject (ZB): “...plasma etching...”
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31
Vakuumbeschichtung Vol 0002: Verfahren und Anlagen.
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Kienel, G.
1995
Subject (ZB): “...etching...”
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32
Plasma processing and processing science / [E-Book]
Subject (ZB): “...Semiconductors Etching....”

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33
Cold plasma in materials fabrication : from fundamentals to applications /
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Subject (ZB): “...plasma etching...”
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34
Metallographisches, keramographisches, plastographisches Ätzen.
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Subject (ZB): “...etching...”
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35
Plasma sources for thin film deposition and etching.
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Subject (ZB): “...plasma etching...”
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International Conference on Indium Phosphide and Related Materials I. 6 : (IPRM 6) : proceedings, Santa-Barbara, CA, 27. - 31.3.1994.
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1994
Subject (ZB): “...etching...”
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37
Introduction to microlithography.
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Subject (ZB): “...plasma etching...”
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38
E.C. Photovoltaic Solar Energy Conference. 11 : proceedings of the international conference, held at Montreux, Switzerland, 12-16 October 1992 /
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Subject (ZB): “...etching...”
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39
Excimer lasers and new trends in laser microtechnology : International symposium workshop on excimer lasers and new trends in laser microtechnology: papers : Bremen, 10.11.92-13.11.92.
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Metev, S.
1993
Subject (ZB): “...chemical etching...”
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40
Electrochemistry of semiconductors and electronics : processes and devices /
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Subject (ZB): “...chemical etching...”
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