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Leistner, E.
3
Weck, E.
3
Flamm, Daniel L.
2
Heimann, R. B.
2
Hitchon, W. N. G.
2
Luecke, K.
2
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Petzow, Günter.
2
Thompson, L. F.
2
Allen, Susan D.
1
Arce, Gonzalo R.
1
Ashby, Carol Iris Hill
1
Auciello, Orlando
1
Becker, Thomas
1
Beckert, M.
1
Benedetti, E. L.
1
Berglund, Torkel.
1
Bernhardt, A. F.
1
Bogenschütz, August Friedrich.
1
Bowden, M. J.
1
Boyd, I. W.
1
Brannon, James H.
1
Brauer, K. H.
1
Broszeit, E.
1
Bull, R. K.
1
Carle, Veronika.
1
Chang, C. Y.
1
Chang, R. P.
1
Chapman, Brian N.
1
Chen, Francis F.
1
Chinn, Richard E.
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etching
48
plasma etching
24
plasma processing
9
chemical vapor deposition
7
plasma deposition
6
Plasma etching.
4
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epitaxy
4
lithography
4
thin film technology
4
III - V semiconductor
3
Semiconductors -- Etching.
3
fabrication
3
ion etching
3
ion implantation
3
laser
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laser processing
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microelectronics
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microlithography
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microtechnology
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plasma physics
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processing
3
semiconductor
3
sputtering
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surface modification
3
thin film
3
Semiconductors
2
ceramics
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chemical etching
2
compound semiconductor
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diamond
2
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FGKJ - Plasma processing, etching
37
FMGE - Metallographic specimen preparation
9
FGM - Microelectronic technology
8
FGJ - Laser and electron beam processing
4
FJKC - III - V semiconductors
4
FAF - Materials research - comprehensive works
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FGKC - Vacuum deposition, MBE
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FGT - Microtechnology
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FJKB - Elemental semiconductors
3
FJLB - Physics of semiconductor devices
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FDCD - Dislocations
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FFPG - Multilayer systems, quantum structures
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FGCK - Crystal technology
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FGK - Thin film technology, epitaxy
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FGN - Nanotechnology
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PGA - Plasma physics
2
CBR - Inorganic synthesis and reactions of metals and their compounds
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CER - Macromolecular compounds - synthesis and reactions
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CHA - Physical chemistry - comprehensive works
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CLD - High temperature chemistry, plasma chemistry
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CLJ - Catalyst materials
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CLMD - Catalytic processes of inorganic compounds
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CLMH - Catalytic processes of organic compounds
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CNJ - Electrochemistry - comprehensive works
1
CUM - Laser spectroscopy
1
CUMB - Laser induced processes
1
EIP - Photovoltaics
1
EIS - Solar cells
1
EISF - Thin film solar cells
1
FAO - Materials science - introductions
1
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