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1
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In situ patterning: selective area deposition and etching: symposium : Boston, MA, 29.11.89-01.12.89.
Bernhardt, A. F.
1990
Subject (ZB):
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laser
processing
...
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2
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Laser assisted deposition, etching, and doping : Los-Angeles, CA, 26.01.1984-27.01.1984 /
Allen, Susan D.
1984
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...
laser
processing
...
”
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Name
Allen, Susan D.
1
Bernhardt, A. F.
1
Subject
etching
laser processing
2
electron beam processing
1
ion beam processing
1
Classification
FGJ - Laser and electron beam processing
2
FGKJ - Plasma processing, etching
2
FAF - Materials research - comprehensive works
1
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English
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