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1
Book
Crystal growth of multifunctional borates and related materials /
Leonyuk, Nikolay I.
2019
Subject (ZB):
“
...
liquid
phase
epitaxy
...
”
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2
Book
Liquid-phase epitaxial growth of III-V compound semiconductor materials and their device applications /
Astles, Mike G.
1990
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“
...
liquid
phase
epitaxy
...
”
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3
Book
Microelectronics processing: chemical engineering aspects /
Hess, D. W.
1989
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“
...
liquid
phase
epitaxy
...
”
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Available as
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3
Material Type
Book
3
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Location
ZB
3
Name
Astles, Mike G.
1
Hess, D. W.
1
Leonyuk, Nikolay I.
1
Subject
liquid phase epitaxy
3
III - V semiconductor
1
VLSI technology
1
borate
1
chemical vapor deposition
1
crystal
1
more ...
crystal growth
1
electronic packaging
1
film deposition
1
materials processing
1
microelectronics
1
microlithography
1
photoresist
1
plasma etching
1
vapor phase epitaxy
1
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Classification
FCBH - Crystal structure of specific substances
1
FGK - Thin film technology, epitaxy
1
FGM - Microelectronic technology
1
FJKC - III - V semiconductors
1
Language
English
3
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