1
Gate dielectrics and MOS ULSls : principles, technologies and applications /
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Subject (ZB): “...field effect transistor...”
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MOS - Transistoren in selektiver Epitaxie.
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Subject (ZB): “...MOS transistor...”
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3
Advanced interconnection and contact schemes based on TiSi2 and CoSi2: relevant materials issues and technological implementation.
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Subject (ZB): “...MOS transistor...”
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