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FGMH - Metallization, physics of microelectronics
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FGMH - Metallization, physics of microelectronics
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1
Book
Chemical vapor deposition of tungsten and tungsten silicides for VLSI/ULSI applications /
Schmitz, John E. J.
1992
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tungsten
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Tungsten and other advanced metals for VLSI/ULSI applications. 0005 : Workshop on Tungsten and Other Advanced Metals for VLSI/ULSI Applications : 0005: proceedings : San-Mateo, CA,...
Wong, S. S.
1990
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Tungsten and other refractory metals for VLSI applications. 4 : International workshop on tungsten and other refractory metals for VLSI applications. 1988: proceedings : Albuquerqu...
Blewer, R. S.
1989
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tungsten
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4
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Tungsten and other refractory metals for VLSI applications. 3 : Workshop on tungsten and other refractory metals for vlsi applications. 1987: proceedings : Yorktown-Heights, NY, 07...
Wells, V. A.
1988
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tungsten
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5
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Tungsten and other refractory metals for VLSI applications. 2 : Workshop on Tungsten and Other Refractory Metals for VLSI Application : 1986: proceedings : Palo-Alto, CA, 12.11.86-...
Broadbent, E. K.
1987
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tungsten
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6
Book
Tungsten and other refractory metals for VLSI applications. 1 : Workshop on tungsten and other refractory metals for VLSI applications. 1985: proceedings : Workshop on tungsten and...
Blewer, R. S.
1986
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tungsten
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Available as
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6
Material Type
Book
6
Type of Literature
Conference Publication
5
Handbook, Textbook
1
Year of Publication
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Location
ZB
6
IFF
1
Name
Blewer, R. S.
2
Broadbent, E. K.
1
Schmitz, John E. J.
1
Wells, V. A.
1
Wong, S. S.
1
Subject
VLSI technology
6
metallization
6
tungsten
6
chemical vapor deposition
2
silicide
1
Classification
FGMH - Metallization, physics of microelectronics
FMT - Refractory metals, refractory alloys
5
FGKF - Chemical vapor deposition
1
Language
English
1
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