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E-Book
Shape and functional elements of the bulk silicon microtechnique [E-Book] : a manual of wet-etched silicon structures /
Frühauf
,
Joachim
.
2005
Other Personal Name(s):
“
...
Frühauf
,
Joachim
....
”
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2
E-Book
Shape and Functional Elements of the Bulk Silicon Microtechnique [E-Book] : A Manual of Wet-Etched Silicon Structures /
Frühauf
,
Joachim
.
2005
Other Personal Name(s):
“
...
Frühauf
,
Joachim
....
”
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Name
Frühauf, Joachim.
2
Subject
Chemical engineering.
1
Electronic materials.
1
Electronics.
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Materials science.
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Microelectronics.
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Microwaves.
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Optical engineering.
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