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1
E-Book
Matellorganische Gasphasenabscheidung (MOCVD) oxidischer Dünnschichten aus dem Materialsystem Barium-Titanat-Zirkonat für integrierte Kondensatoren [E-Book] /
Ganster
,
Ralf
2004
Other Personal Name(s):
“
...
Ganster
,
Ralf
...
”
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ZB
1
Name
Ganster, Ralf
1
Subject
barium
1
chemical vapor deposition
1
condenser
1
ferroelectric material
1
titanate
1
zirconate
1
Classification
FJBE - Ferroelectric materials
1
Language
German
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