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1
Book
Epitaktische Seltenerd-Scandatschichten für die Mikroelektronik /
Heeg
,
Tassilo
.
2007
Other Personal Name(s):
“
...
Heeg
,
Tassilo
....
”
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ZB
1
Name
Heeg, Tassilo.
1
Subject
layer compound
1
layer structure
1
microelectronics
1
rare earth compound
1
Classification
FGMH - Metallization, physics of microelectronics
1
TBD - Microelectronics
1
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