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1
Book
Characterization of plasma enhanced cvd processes: symposium: proceedings : Boston, MA, 27.11.89-28.11.89.
Lucovsky
,
G
.
1990
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Lucovsky
,
G
....
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2
Book
The Physics of MOS insulators : proceedings of the International Topical Conference on the Physics of MOS Insulators, held at the Jane S. McKimmon Conference Center, North Carolina...
Lucovsky
,
G
.
1980
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...
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,
G
....
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3
Book
Structure and excitations of amorphous solids : International conference on structure and excitations of amorphous solids : Williamsburg, VA, 25.03.1976-27.03.1976.
Lucovsky
,
G
.
1976
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Lucovsky
,
G
....
”
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3
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Book
3
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Conference Publication
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ZB
3
Name
Lucovsky, G.
3
Galeener, F. L.
1
Pantelides, Sokrates T.
1
Subject
chemical vapor deposition
1
plasma deposition
1
Classification
FAF - Materials research - comprehensive works
1
FEJB - Amorphous materials
1
FFPE - Thin film electronic properties, semiconductor interfaces
1
FGKJ - Plasma processing, etching
1
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