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1
Book
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /
Madou
,
Marc
J
.
2012
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,
Marc
J
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2
Book
Manufacturing techniques for microfabrication and nanotechnology /
Madou
,
Marc
J
.
2012
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,
Marc
J
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3
Book
From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications /
Madou
,
Marc
J
.
2012
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,
Marc
J
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4
E-Book
Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications [E-Book] /
Madou
,
Marc
J
.
2011
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,
Marc
J
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5
E-Book
Micromanufacturing [E-Book] : International Research and Development /
Ehmann, Kornel F.
2007
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Madou
,
Marc
....
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6
Book
Fundamentals of microfabrication : the science of miniaturization /
Madou
,
Marc
J
.
2002
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,
Marc
J
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7
Book
Chemical sensing with solid state devices /
Madou
,
Marc
J
.
1989
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Madou
,
Marc
J
....
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Available as
Print Edition
5
Electronic Edition
2
Material Type
Book
7
Type of Literature
Handbook, Textbook
3
Year of Publication
From:
To:
Location
ZB
7
Name
Madou, Marc J.
6
Bourell, David.
1
Culpepper, Martin L.
1
Devor, Richard.
1
Ehmann, Kornel F.
1
Hodgson, Thom J.
1
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Kurfess, Thomas R.
1
Madou, Marc.
1
Morrison, S. Roy.
1
Rajurkar, Kamlakar.
1
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Subject
nanotechnology
4
microelectromechanical systems (MEMS)
2
microfabrication (for microelectronics only)
2
nanoelectronics
2
scaling theory
2
Electronics
1
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Engineering
1
Engineering design
1
Engineering economy
1
Machinery
1
chemical vapor deposition
1
construction
1
crystallography
1
design
1
etching
1
integrated circuit
1
lithography
1
machining
1
microelectronics
1
microtechnology
1
photonics
1
quantum mechanics
1
solid state physics
1
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Classification
FGN - Nanotechnology
4
FGT - Microtechnology
4
FGM - Microelectronic technology
1
TBJ - Integrated circuits
1
TBW - Sensors, actuators
1
Language
English
4
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