1
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /
Book
Other Personal Name(s): ...Madou, Marc J....
Table of Contents 
2
Manufacturing techniques for microfabrication and nanotechnology /
Book
Other Personal Name(s): ...Madou, Marc J....
Table of Contents 
3
From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications /
Book
Other Personal Name(s): ...Madou, Marc J....
Table of Contents 
4
Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications [E-Book] /
5
Micromanufacturing [E-Book] : International Research and Development /
6
Fundamentals of microfabrication : the science of miniaturization /
Book
Other Personal Name(s): ...Madou, Marc J....
7
Chemical sensing with solid state devices /
Book
Other Personal Name(s): ...Madou, Marc J....