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1
Book
Abscheidung von kohlenstoffbasierten Schichten im Grobvakuum mittels Mittelfrequenz-Plasma-CVD /
Michler
,
Thorsten
.
1998
Other Personal Name(s):
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...
Michler
,
Thorsten
....
”
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ZB
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Michler, Thorsten.
1
Subject
chemical vapor deposition
1
plasma deposition
1
thin film
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FGGB - Ion implantation, ion beam synthesis
1
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