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Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California USA /
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Chemical mechanical planarization of microelectronic materials /
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Advanced metallization for devices and circuits - science, technology and manufacturability: symposium : San-Francisco, CA, 04.04.94-08.04.94.
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Electronic materials : science and technology /
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Silicides for VLSI applications /
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