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1
Book
Dry etching for microelectronics.
Powell
,
R
.
A
.
1984
Other Personal Name(s):
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...
Powell
,
R
.
A
....
”
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IEK-5
ZB
1
Name
Powell, R. A.
1
Subject
etching
1
Classification
FGKJ - Plasma processing, etching
1
FGM - Microelectronic technology
1
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