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1
Book
Industrial plasma engineering. 2. Applications to nonthermal plasma processing /
Roth
,
J
.
Reece
.
2001
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J
.
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2
Book
Industrial plasma engineering. 1. Principles /
Roth
,
J
.
Reece
.
1995
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J
.
Reece
....
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IEK-4
2
Name
Roth, J. Reece.
2
Subject
plasma processing
1
Classification
PGA - Plasma physics
2
FGKJ - Plasma processing, etching
1
Language
English
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