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Plasma etching.
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Plasma etching.
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1
E-Book
Introduction to microlithography : theory, materials, and processing [E-Book] /
Thompson
, L. F.
1983
Other Personal Name(s):
“
...Willson,
C
. G....
”
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Book
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ZB
1
Name
Bowden, M. J.
1
Thompson, L. F.
1
Willson, C. G.
1
Subject
Lithography -- Research.
1
Microlithography.
1
Photolithography.
1
Photoresists.
1
Plasma etching.
Semiconductors -- Etching.
1
Language
English
1
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