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FGKJ - Plasma processing, etching
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FGKJ - Plasma processing, etching
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1
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Plasma chemistry. 3.
Veprek
, S.
1980
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Veprek
, S....
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INM-5
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ZB
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Veprek, S.
1
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plasma etching
1
plasma wall interaction
1
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CLD - High temperature chemistry, plasma chemistry
1
FGKJ - Plasma processing, etching
PGLJ - Plasma wall interaction, divertors
1
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