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1
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Advances in thin film technology : Sputtering and etching : Materials Research Corporation : sputtering schools. 34 and 35 : Roma, Santa-Barbara, CA, 06.84 ; 11.84.
Weinig
, S.
1984
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Weinig
, S....
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Weinig, S.
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ion etching
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sputter deposition
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FGKC - Vacuum deposition, MBE
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FGKJ - Plasma processing, etching
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