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FGKJ - Plasma processing, etching
Houben, Lothar
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FGKJ - Plasma processing, etching
Houben, Lothar
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Plasmaabscheidung von mikrokristallinem Silizium : Merkmale und Mikrostruktur und deren Deutung im Sinne von Wachstumsvorgängen [E-Book] /
Houben, Lothar
2000
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ZB
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Name
Houben, Lothar
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microstructure analysis
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silicon
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FGKJ - Plasma processing, etching
FHAB - Surface and thin film characterization
1
FJKB - Elemental semiconductors
1
Language
German
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