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FGKJ - Plasma processing, etching
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FGGB - Ion implantation, ion beam synthesis
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FGKJ - Plasma processing, etching
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FGGB - Ion implantation, ion beam synthesis
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Handbook of plasma immersion ion implantation and deposition /
Anders, Andre
2000
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2
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Ion implantation and plasma assisted processes : proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications, Atlanta, Georgia, 22-2...
Hochman, Robert F.
1988
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2
Name
Anders, Andre
1
Hochman, Robert F.
1
Legg, Keith O.
1
Solnick-Legg, Hillary.
1
Subject
film deposition
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industrial aspect
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ion implantation
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materials characterization
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metal surface
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plasma processing
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FGGB - Ion implantation, ion beam synthesis
FGKJ - Plasma processing, etching
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