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FGKJ - Plasma processing, etching
film deposition
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FGKJ - Plasma processing, etching
film deposition
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Handbook of plasma immersion ion implantation and deposition /
Anders, Andre
2000
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Plasmagestützte Abscheidung und Charakterisierung von dünnen mehrphasigen Schichten [E-Book] /
Nöthe, Michael
2000
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Handbook, Textbook
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ZB
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Name
Anders, Andre
1
Nöthe, Michael
1
Subject
film deposition
plasma processing
2
coating
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industrial aspect
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ion implantation
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materials characterization
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metal surface
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surface properties
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Classification
FGKJ - Plasma processing, etching
FGGB - Ion implantation, ion beam synthesis
1
FHAB - Surface and thin film characterization
1
FPU - Corrosion protection, surface coating
1
Language
English
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German
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