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FGKJ - Plasma processing, etching
ion implantation
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FGKJ - Plasma processing, etching
ion implantation
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1
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Handbook of plasma immersion ion implantation and deposition /
Anders, Andre
2000
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Principles of plasma discharges and materials processing /
Lichtenberg, Allan J.
2005
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Vakuumbeschichtung Vol 0001: Plasmaphysik, Plasmadiagnostik, Analytik.
Frey, H.
1995
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ZB
3
IEK-4
1
Name
Anders, Andre
1
Frey, H.
1
Lichtenberg, Allan J.
1
Lieberman, Michael E.
1
Subject
ion implantation
plasma physics
2
thin film technology
2
chemical vapor deposition
1
discharge
1
film deposition
1
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industrial aspect
1
materials characterization
1
metal surface
1
plasma diagnostics
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plasma etching
1
plasma processing
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surface analysis
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vacuum deposition
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Classification
FGKJ - Plasma processing, etching
FGGB - Ion implantation, ion beam synthesis
1
FGKC - Vacuum deposition, MBE
1
PGA - Plasma physics
1
Language
English
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