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FGKJ - Plasma processing, etching
materials processing
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FGKJ - Plasma processing, etching
materials processing
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Handbook of advanced plasma processing techniques /
Shul, R. J.
2000
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High energy density technologies in materials science. 2 : IGD Scientific Workshop : proceedings : Novara, 03.05.88-04.05.88.
Garbassi, F.
1990
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Radio frequency/radiation and plasma processing : industrial applications & advances /
Annett, D. M.
1985
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Conference Publication
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ZB
3
Name
Annett, D. M.
1
Cheremisinoff, Paul N.
1
Farah, Oscar G.
1
Garbassi, F.
1
Ouellette, Robert P.
1
Shul, R. J.
1
Subject
materials processing
plasma processing
3
beam processing
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compound semiconductor
1
electron beam processing
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etching
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magnetic material
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microelectronics
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FGKJ - Plasma processing, etching
FGJ - Laser and electron beam processing
2
FGA - Materials processing - general aspects
1
FGM - Microelectronic technology
1
Language
English
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