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FGKJ - Plasma processing, etching
plasma etching
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FGKJ - Plasma processing, etching
plasma etching
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1
Book
Field assisted sintering of yttria ceramics for plasma etching applications /
Kindelmann, Moritz
2021
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2
Book
Glow discharge processes : sputtering and plasma etching /
Chapman, Brian N.
1980
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3
Book
Kalte Plasmen : Grundlagen, Erscheinungen, Anwendungen /
Franz, Gerhard.
1990
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4
Book
Low temperature plasma physics : fundamental aspects and applications /
Hippler, Rainer
2001
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5
Book
Plasma chemistry. 3.
Veprek, S.
1980
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6
Book
Plasma deposition, treatment, and etching of polymers /
D' Agostino, Riccardo.
1990
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7
Book
Plasma etching : an introduction /
Manos, Dennis M.
1989
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8
Book
Plasma etching in semiconductor fabrication.
Morgan, R. A.
1985
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9
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Plasma processes for semiconductor fabrications /
Hitchon, W. N. G.
1999
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10
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Plasma processing : Plasma etching and deposition: proceedings of the symposium : Electrochemical Society: spring meeting. 1980 : Saint-Louis, MO, 11.05.1980-16.05.1980.
Frieser, R. G.
1981
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11
Book
Plasma sources for thin film deposition and etching.
Francombe, M. H.
1994
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12
Book
Plasma surface engineering vol 0001 : International conference on plasma surface engineering 0001: papers : Garmisch-Partenkirchen, 19.09.88-23.09.88.
Broszeit, E.
1989
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13
Book
Plasma-surface interactions and processing of materials : NATO Advanced Study Institute on Plasma Surface Interactions and Processing of Materials: proceedings : Alicante, 04.09.88...
Auciello, Orlando
1990
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14
Book
Plasma synthesis and etching of electronic materials : Symp : Boston, MA, 27.11.1984-30.11.1984.
Chang, R. P.
1985
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15
Book
Preparation and characterization : Film preparation and etching by plasma technology : international seminar : Brighton, 25.03.81-27.03.81.
1981
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16
Book
Principles of plasma discharges and materials processing /
Lichtenberg, Allan J.
2005
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Available as
Print Edition
16
Material Type
Book
16
Type of Literature
Conference Publication
5
Handbook, Textbook
2
Theses
1
Year of Publication
From:
To:
Location
ZB
14
IEK-4
3
IBN-1-2
1
IBN-3-4
1
IFF
1
INM-5
1
Name
Flamm, Daniel L.
2
Auciello, Orlando
1
Broszeit, E.
1
Chang, R. P.
1
Chapman, Brian N.
1
D' Agostino, Riccardo.
1
more ...
Francombe, M. H.
1
Franz, Gerhard.
1
Frieser, R. G.
1
Gras-Marti, Alberto
1
Hippler, Rainer
1
Hitchon, W. N. G.
1
Kindelmann, Moritz
1
Lichtenberg, Allan J.
1
Lieberman, Michael E.
1
Manos, Dennis M.
1
Morgan, R. A.
1
Valles-Abarca, Jose Antonia
1
Veprek, S.
1
see all ...
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Subject
plasma etching
plasma processing
6
plasma deposition
5
plasma physics
2
plasma wall interaction
2
surface modification
2
more ...
thin film technology
2
ceramics
1
chemical vapor deposition
1
discharge
1
glow discharge
1
grain growth
1
ion implantation
1
plasma diagnostics
1
polymerization
1
semiconductor
1
sintering
1
sputter deposition
1
sputtering
1
thin film physics
1
see all ...
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Classification
FGKJ - Plasma processing, etching
CER - Macromolecular compounds - synthesis and reactions
1
CLD - High temperature chemistry, plasma chemistry
1
FAF - Materials research - comprehensive works
1
FFP - Physics of thin films
1
FGKC - Vacuum deposition, MBE
1
more ...
FNT - Powder technology
1
FPUJ - Surface engineering
1
PGA - Plasma physics
1
PGCC - Electric discharges in gases
1
PGLJ - Plasma wall interaction, divertors
1
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Language
English
2
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