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FGKJ - Plasma processing, etching
sputter deposition
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FGKJ - Plasma processing, etching
sputter deposition
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1
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Advances in thin film technology : Sputtering and etching : Materials Research Corporation : sputtering schools. 34 and 35 : Roma, Santa-Barbara, CA, 06.84 ; 11.84.
Weinig, S.
1984
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Kalte Plasmen : Grundlagen, Erscheinungen, Anwendungen /
Franz, Gerhard.
1990
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Wear and corrosion resistant coatings by CVD and PVD /
Pulker, H. K.
1989
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Available as
Print Edition
3
Material Type
Book
3
Type of Literature
Conference Publication
1
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ZB
3
Name
Bergmann, E.
1
Franz, Gerhard.
1
Pulker, H. K.
1
Weinig, S.
1
Subject
sputter deposition
chemical vapor deposition
1
coating
1
corrosion resistance
1
evaporation
1
ion etching
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plasma etching
1
plasma processing
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wear resistance
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Classification
FGKJ - Plasma processing, etching
FGKC - Vacuum deposition, MBE
1
FPQ - Surface friction, hardness, wear, lubrication
1
FPUG - Special purpose coatings
1
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