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PGA - Plasma physics
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FGKJ - Plasma processing, etching
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PGA - Plasma physics
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FGKJ - Plasma processing, etching
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1
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Industrial plasma engineering. 2. Applications to nonthermal plasma processing /
Roth, J. Reece.
2001
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2
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Industrial plasma technology : applications from environmental to energy technologies /
Kawai, Yoshinobu
2010
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3
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Plasma nanoscience : basic concepts and applications of deterministic nanofabrication /
Ostrikov, Kostya (Ken)
2008
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Principles of plasma discharges and materials processing /
Lichtenberg, Allan J.
2005
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4
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ZB
3
IEK-4
2
Name
Kawai, Yoshinobu
1
Lichtenberg, Allan J.
1
Lieberman, Michael E.
1
Ostrikov, Kostya (Ken)
1
Roth, J. Reece.
1
Subject
cold plasma
2
thin film technology
2
biological aspect
1
chemical vapor deposition
1
discharge
1
environmental impact
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flow distribution
1
gas flow
1
ion implantation
1
nanostructured material
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nanostructures
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nanotechnology
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plasma
1
plasma deposition
1
plasma etching
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plasma physics
1
plasma processing
1
solar cell
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Classification
FGKJ - Plasma processing, etching
PGA - Plasma physics
CLD - High temperature chemistry, plasma chemistry
1
Language
English
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