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IBN-1-2
FGM - Microelectronic technology
integrated circuit
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IBN-1-2
FGM - Microelectronic technology
integrated circuit
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1
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International Electron Devices Meeting. 1999 : IEDM : technical digest : Washington, DC, December 5-8, 1999 /
1999
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2
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Silicon processing for the VLSI era. 1. Process technology /
Wolf, Stanley.
2000
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IBN-1-2
ZB
2
IFF
1
Name
Tauber, Richard N.
1
Wolf, Stanley.
1
Subject
integrated circuit
VLSI technology
1
quantum electronics
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sensor (technical and physical)
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silicon
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FGM - Microelectronic technology
TBF - Semiconductor devices
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TBV - Electronic devices
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