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IBN-1-2
AND
ZB
Book
FGM - Microelectronic technology
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FGM - Microelectronic technology
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1
Book
Halbleiter Technologie.
Ruge, I.
1984
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2
Book
International Electron Devices Meeting. 1999 : IEDM : technical digest : Washington, DC, December 5-8, 1999 /
1999
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3
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Microsystem technology /
Menz, Wolfgang.
2001
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4
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Modern semiconductor device physics /
Sze, S. M.
1998
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5
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Plasma processing for VLSI.
Einspruch, N. G.
1984
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6
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Processing of semiconductors.
Jackson, K. A.
1996
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7
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Semiconductor devices, physics and technology /
Sze, S. M.
1985
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8
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Silicon processing for the VLSI era. 1. Process technology /
Wolf, Stanley.
2000
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9
Book
VLSI technology /
Sze, S. M.
1983
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Available as
Print Edition
9
Material Type
Book
Type of Literature
Handbook, Textbook
3
Conference Publication
1
Year of Publication
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IBN-1-2
ZB
IFF
1
Name
Sze, S. M.
3
Einspruch, N. G.
1
Jackson, K. A.
1
Mader, H.
1
Menz, Wolfgang.
1
Mohr, Jürgen.
1
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Paul, Oliver.
1
Ruge, I.
1
Tauber, Richard N.
1
Wolf, Stanley.
1
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Subject
VLSI technology
2
integrated circuit
2
MOS transistor
1
field effect transistor
1
lithography
1
microelectronics
1
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microstructure
1
microtechnology
1
packaging
1
quantum electronics
1
semiconductor device
1
semiconductor processing
1
sensor (technical and physical)
1
silicon
1
solar cell
1
transistor
1
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Classification
FGM - Microelectronic technology
FJLB - Physics of semiconductor devices
2
TBF - Semiconductor devices
2
FAF - Materials research - comprehensive works
1
FGA - Materials processing - general aspects
1
FGCD - Crystal growth of specific substances
1
more ...
FGK - Thin film technology, epitaxy
1
FGKJ - Plasma processing, etching
1
FGT - Microtechnology
1
TBV - Electronic devices
1
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Language
English
1
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