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IBN-1-2
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silicon
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1
Book
Handbook on physical properties of Ge, Si, GaAs and InP.
Dargys, A.
1994
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2
Book
Silicon processing for the VLSI era. 1. Process technology /
Wolf, Stanley.
2000
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IBN-1-2
ZB
IFF
1
Name
Dargys, A.
1
Kundrotas, J.
1
Tauber, Richard N.
1
Wolf, Stanley.
1
Subject
silicon
VLSI technology
1
gallium arsenide
1
germanium
1
indium phosphide
1
integrated circuit
1
Classification
FAA - Materials research - reference books
1
FGM - Microelectronic technology
1
FJK - Specific semiconductor materials
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