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IBN-1-2
Conference Publication
silicon
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Materials issues in novel Si-based technology : symposium held Nevember 26-28, 2001 Boston, Massachusetts, US /
En, William G.
2002
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Si front-end processing : physics and technology of dopant-defect interactions : symposium held April 6 - 9, 1999, San Francisco, California, USA [as part of the 1999 MRS spring me...
Gossmann, Hans-Joachim L.
1999
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IBN-1-2
Name
En, William G.
1
Gossmann, Hans-Joachim L.
1
Subject
silicon
materials
1
research
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semiconductor processing
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FAF - Materials research - comprehensive works
1
FJHE - Defects and radiation effects in semiconductors
1
FJLB - Physics of semiconductor devices
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