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IBN-1-2
microelectronics
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materials science
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microelectronics
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Materials science of microelectromechanical systems (MEMS) devices. IV : symposium held November 25-28, 2001 Boston, Massachusetts USA /
Ayon, Arturo A.
2002
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IBN-1-2
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Ayon, Arturo A.
1
Buchheit, Thomas E.
1
Kahn, Harold
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Spearing, S. Mark
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Subject
materials science
mechanical properties
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microelectronics
microstructure
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FGM - Microelectronic technology
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English
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