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FGK - Thin film technology, epitaxy
Klinkhammer, Frank
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Theses
FGK - Thin film technology, epitaxy
Klinkhammer, Frank
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Nanostrukturierung von epitaktischen CoSi2/Si-Heterostrukturen mittels lokaler Oxidation [E-Book] /
Klinkhammer, Frank
1998
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Name
Klinkhammer, Frank
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epitaxy
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heterostructure
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nanostructures
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silicide
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FGK - Thin film technology, epitaxy
FGN - Nanotechnology
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German
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