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FHAB - Surface and thin film characterization
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FGKJ - Plasma processing, etching
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FHAB - Surface and thin film characterization
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FGKJ - Plasma processing, etching
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E-Book
Plasmaabscheidung von mikrokristallinem Silizium : Merkmale und Mikrostruktur und deren Deutung im Sinne von Wachstumsvorgängen [E-Book] /
Houben, Lothar
2000
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Plasmagestützte Abscheidung und Charakterisierung von dünnen mehrphasigen Schichten [E-Book] /
Nöthe, Michael
2000
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ZB
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Name
Houben, Lothar
1
Nöthe, Michael
1
Subject
coating
1
film deposition
1
microstructure analysis
1
plasma processing
1
silicon
1
surface properties
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Classification
FGKJ - Plasma processing, etching
FHAB - Surface and thin film characterization
FJKB - Elemental semiconductors
1
FPU - Corrosion protection, surface coating
1
Language
German
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